Table 2: Percentage ratios of the Nb atoms to O contents of the Nb oxides deposited on a silicon substrate at different deposition powers.
|
Sample # |
Atomic % |
Weight % |
||
|
Power (W) |
Oxygen (K) |
Nb (L) |
Oxygen |
Nb |
|
200 |
89.83 |
10.17 |
60.33 |
39.67 |
|
225 |
89.9 |
10.1 |
60.51 |
39.49 |
|
250 |
88.08 |
11.92 |
56.01 |
43.99 |
|
275 |
76.39 |
23.61 |
35.78 |
64.22 |
|
300 |
87.49 |
12.51 |
54.63 |
45.37 |