Table 1: Comparison of Performance Parameters between Subthreshold and Super-Threshold Device.

Performance Parameters Subthreshold Device Super-Threshold Device
Intrinsic Gate Delay 0.18 ps 1.2 ps
Drive Current, Ion 6.5e-6 A/μm 2.3e-6 A/μm
Leakage Current, Ioff 1.7e-9 A/μm 1.1e-9 A/μm
Subthreshold Swing, SS 68 mV/dec 72 mV/dec
Threshold Variation, DIBL 1 mV 1.2 mV
Threshold Voltage, Vth 0.01 V 0.018 V