Table 1: Comparison of Performance Parameters between Subthreshold and Super-Threshold Device.
| Performance Parameters | Subthreshold Device | Super-Threshold Device |
| Intrinsic Gate Delay | 0.18 ps | 1.2 ps |
| Drive Current, Ion | 6.5e-6 A/μm | 2.3e-6 A/μm |
| Leakage Current, Ioff | 1.7e-9 A/μm | 1.1e-9 A/μm |
| Subthreshold Swing, SS | 68 mV/dec | 72 mV/dec |
| Threshold Variation, DIBL | 1 mV | 1.2 mV |
| Threshold Voltage, Vth | 0.01 V | 0.018 V |