Table 1: Characteristics of P-625.1 piezo stage.

Open loop travel

Closed loop travel

Closed loop resolution

Linearity error

Repeat-ability

Stiffness

Res. freq. 20 g

Material

Dimens.

Mass

600 µ

500 µ

0.5 nm

0.03%

±5 nm

0.1 N/µ

180 Hz

Al

60 ´ 60 ´ 15 mm3

240 g