Table 1: Characteristics of P-625.1 piezo stage.
Open loop travel |
Closed loop travel |
Closed loop resolution |
Linearity error |
Repeat-ability |
Stiffness |
Res. freq. 20 g |
Material |
Dimens. |
Mass |
600 µ |
500 µ |
0.5 nm |
0.03% |
±5 nm |
0.1 N/µ |
180 Hz |
Al |
60 ´ 60 ´ 15 mm3 |
240 g |