Statistics of nanopillar LED patterned from rapid thermal processing of thin Au film in terms of Au film thickness, active region ratio, and nanopillar density.

Table 1: Statistics of nanopillar LED patterned from rapid thermal processing of thin Au film in terms of Au film thickness, active region ratio, and nanopillar density.

Sample	ref	a	b	c	d	e	f
Au film thickness (nm)	0	6	7	8	9	10	11
Active region ratio (%)	100	38.1	32.1	33	40.7	37.6	37.6
Nanopillar density (1/μm²)	n/a	107	101	75.2	49	45.3	39.5