Table 1: The experimental data of laser ablation depth.

Energy (mW)

Step distance (um)

Scanning velocity (mm/s)

Scanning times

Ablation depth (mm)

10

2

0.4

4

0.096

10

2

1.2

6

0.062

10

4

0.8

2

0.014

10

6

0.4

4

0.083

10

6

1.2

2

0.014

30

2

0.8

4

0.113

30

4

0.4

4

0.127

30

4

1.2

10

0.096

30

6

0.8

4

0.047

40

4

2

2

0.056

40

4

2

4

0.148

40

4

2

6

0.198

50

2

0.4

2

0.163

50

2

1.2

2

0.061

50

4

0.8

4

0.104

50

6

0.4

4

0.173

50

6

1.2

4

0.049