Substrate

PET (ρ = 1.39 gcm^-3)

PI parameters

Gas system

Base pressure (Pa)

Work pressure (Pa)

Treatment time (s)

rf power (W)

Temperature (K)

SF₆ and N₂

0.1

6.66

900

25 and 100

300

PIII parameters

High voltage (V)

Cycle time (µs)

 Frequency (Hz)

-2400

30

300