Table 1: Plasma immersion procedure conditions for the PET samples.
Substrate |
PET (ρ = 1.39 gcm-3) |
PI parameters |
|
Gas system Base pressure (Pa) Work pressure (Pa) Treatment time (s) rf power (W) Temperature (K) |
SF6 and N2 0.1 6.66 900 25 and 100 300 |
PIII parameters |
|
High voltage (V) Cycle time (µs) Frequency (Hz) |
-2400 30 300 |