Table 1: Parameters of air chamber.

Number

Name

Specifications and models

1

Window pieces 1,2

JGS1, D15 × 2 mm,D18 × 2 mm, double sided polishing

2

PTFE gaskets 1,2

PTFE, inner diameter 12 × outer diameter 15(18) × thickness 1 mm

3

Pagoda through connectors

Stainless steel, SMC,6-M5

4

The sealing plugs

304,M5 × 0.8