Table 1: Parameters of air chamber.
Number |
Name |
Specifications and models |
1 |
Window pieces 1,2 |
JGS1, D15 × 2 mm,D18 × 2 mm, double sided polishing |
2 |
PTFE gaskets 1,2 |
PTFE, inner diameter 12 × outer diameter 15(18) × thickness 1 mm |
3 |
Pagoda through connectors |
Stainless steel, SMC,6-M5 |
4 |
The sealing plugs |
304,M5 × 0.8 |