Table 1: Different values of LN film thickness performances.

LN film thickness (mm)

Lcr (mm)

ER (dB)

fabrication tolerances (nm)

TE    

TM

0.2

190.3

16.7

24.3

200

0.3

47.2

12.8

20.2

200

0.4

36.84

9.4

16.7

300