Table 1: Different values of LN film thickness performances.
LN film thickness (mm) |
Lcr (mm) |
ER (dB) |
fabrication tolerances (nm) |
|
TE |
TM |
|||
0.2 |
190.3 |
16.7 |
24.3 |
200 |
0.3 |
47.2 |
12.8 |
20.2 |
200 |
0.4 |
36.84 |
9.4 |
16.7 |
300 |